Si/ SiGe MODQW (Modulation Doped Quantum Well)

Input files:
  • 1DSiGe_Si_Schaeffler_SemicondSciTechnol1997_nnpp.in

Scope:

This tutorial aims to reproduce Fig. 11 of [Schäffler1997].

Introduction

Layer sequence

width [nm]

material

strain

doping [cm-3]

1

Schottky barrier 0.8 eV

2

15.0

Si cap

strained w.r.t \(Si_{0.75}Ge_{25}\)

3

22.5

\(Si_{0.75}Ge_{25}\) layer

4

15.0

\(Si_{0.75}Ge_{25}\) doping layer

2 \(\cdot\) 1018 (fully ionized)

5

10.0

\(Si_{0.75}Ge_{25}\) barrier

6

18.0

Si channel

strained w.r.t \(Si_{0.75}Ge_{25}\)

7

69.5

\(Si_{0.75}Ge_{25}\) buffer

Material parameters

The material parameters were taken from [Schäffler1997]. The temperature was set to 0.1 K. The \(Si\) layers are strained pseudomorphically with respect to a \(Si_{0.75}Ge_{0.25}\) substrate (buffer layer).

Method

Self-consistent solution of the Schrödinger-Poisson equation within single-band effective-mass approximation (using ellipsoidal effective mass tensors) for both Delta conduction band edges.

Results

Figure 2.4.2.6 shows the self-consistently calculated conduction band profile and the lowest wave functions of an n-type \(Si\)/ \(Si_{0.75}Ge_{0.25}\) modulation doped quantum well (MODQW) grown on a relaxed \(Si_{0.75}Ge_{0.25}\) buffer layer. The strain lifts the sixfold degeneracy of the lowest conduction band (Delta6) and leads to a splitting into a twofold (Delta2) and a fourfold (Delta4) degenerate conduction band edge.

../../../../_images/1DSiGe_Schaeffler_tutorial.jpg

Figure 2.4.2.6 Calculated conduction band edge profile.

Figure 2.4.2.7 shows the lowest three wave functions (\(\Psi^2\)) of the structure. Two eigenstates that have very similar energies and are occupied (i.e. they are below the quasi-Fermi level), whereas the third eigenstate is not occupied at 0.1 K.

../../../../_images/1DSiGe_Schaeffler_tutorial_psi.jpg

Figure 2.4.2.7 Calculated probability densities of the lowest electron states.

The electron density (in units of 1 \(\cdot\) 1018 cm-3) is plotted in Figure 2.4.2.8. The lowest states in each channel are occupied, i.e. are below the Fermi level. The integrated electron densities are:

  • in the parasitic \(Si_{0.75}Ge_{0.25}\) channel: 0.75 \(\cdot\) 1012 cm-2.

  • in the strained \(Si\) channel: 0.66 \(\cdot\) 1012 cm-2.

../../../../_images/1DSiGe_Schaeffler_tutorial_density.jpg

Figure 2.4.2.8 Calculated electron density profile.